By William S. Rees Jr.
Written via top specialists within the box, this useful reference instruction manual deals an updated, severe survey of the chemical vapor deposition (CVD) of nonmetals, a key expertise in semiconductor electronics, completing, and corrosion protection.
the fundamentals precious for any CVD strategy are mentioned within the advent. within the following chapters, precursor specifications, with an emphasis on fabrics chemistry, universal buildings of reactants and substrates, in addition to response regulate are mentioned for a extensive diversity of compositions together with superconducting, engaging in, semiconducting, insulating and structural fabrics. Technological concerns, resembling reactor geometries and operation parameters, are assessed and the viability of the tactic, either technically and economically, is in comparison with different thoughts for the practise of skinny films.
suitable fabrics and technical facts are gathered in tables all through. an in depth thesaurus, record of abbreviations and acronyms, and over 1400 references around off this outstanding work.
The 'CVD of Nonmetals' deals a stimulating mixture of simple strategies and sensible functions. fabrics scientists, solid-state and organometallic chemists, physicists, engineer, in addition to graduate scholars will locate this e-book of enomous worth.
Chapter 1 advent (pages 1–35): William S. Rees
Chapter 2 Superconducting fabrics (pages 37–150): Douglas L. Schulz and Tobin J. Marks
Chapter three engaging in fabrics (pages 151–191): Tobias Gerfin and Klaus?Hermann Dahmen
Chapter four Semiconducting fabrics (pages 193–259): Gary S . Tompa
Chapter five Insulating fabrics (pages 261–319): Andrew R. Barron
Chapter 6 Structural fabrics (pages 321–366): W. Jack Lackey
Chapter 7 different fabrics (pages 367–400): Gertrud Krauter and William S. Rees
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Additional resources for CVD of Nonmetals
57 Effects of Chemical Doping Upon Physical Properties of CVD-Derived Nb3Ge Films . . . . . . . . . . . . . . . 58 NbCI-,N, CVD Film Growth . . . . . . . . . . . . . . . 59 NbCI,N, CVD Precursors and Reaction Schemes . . . . . . . 60 Reactor Design for CVD of NbC,,N, on Carbon Fiber . . . . . . ,N. Films . . . . . . 62 NbN CVD Film Growth . . . . . . . . . . . . . . . . 62 NbN CVD Precursors and Reaction Schemes . . . . . . . .
Arsine generally is removed by heating the exhaust gas in a cracking furnace. Charcoal canisters often are used to absorb vapor phase species. Sulfur has been employed to getter thallium. Very fine particle filters also are used to catch a diversity of solids entrained within the exhaust stream. The choice of the vacuum pump depends on the process (pumping capacity required, pressure range to be used, gases to be pumped). When mechanical pumps are required for use in a given CVD process, care must be taken to avoid pump oil damage initiated by some gaseous species.
For example, halide transport of metals from reactor walls has been found to lead to incorporation of metal impurities in deposits. This generally is a disaster, not merely an inconvenience, resulting in long down time for the reactor, and lost production runs due to the contaminated films. In a hot wall reactor, sufficient thermal energy must be input into the system at several locations other than the substrate, so that homogeneous vapor phase reactions may occur. There is a successive depletion with respect to the reactants as they are transported through the reactor.